DMG Series
(SEMI E84)
The DMG Series optical transceivers extend the parallel I/O communications associated with 300mm material handoff operations between active and passive equipment. With a built-in data logging feature, the transmission/reception signals between semiconductor process equipment and automated material handling systems (AMHS) can be captured and recorded. This stored data is useful for locating and resolving signal anomalies, dropouts and glitches that cause E84 handoffs to fail. An optional data transfer device is used to extract the logged transactions from the DMG sensor head. Through a PC connection, this information can then be viewed and analyzed with exclusive application software.
Applications
Captures and records E84 handshakes to its non-volatile memory
The internal memory provides the capacity to store up to 100 FOUP handoffs
Logged signals can be read through a data transfer tool with exclusive application software
Quickly and reliably transmit data over various distances